AEROHEAT is a long-life mineral insulated metal sheathed heater, developed and based on our superior manufacturing technology of MI cables.
Manufactured from a single diameter cable with no external joins to eliminate mechanical failure points, the heater assemblies have an integrated unheated cold section so there is no requirement for additional and costly infrastructure such as water cooling pipe work and systems to maintain lower temperatures required by sealing flange O rings and other sealing port connections. This design of the AEROHEAT assembly can greatly reduce the overall plant running cost and help end users meet their environment operating targets.
The AEROHEAT heater and terminations can be integrated into sealing flanges or ports to maintain full sealing even in the highest vacuum atmospheres.
AEROHEAT is especially suitable for all forms of deposition equipment such as:
- Sputtering
- Ion Plating
- CVD
- ALD
By arranging a set of multiple panel heaters, precise temperature control can be achieved even with the largest of today’s and future glass substrates including Generation 10 and above. As well as surface temperature uniformity on substrates, a circuit partition is also possible in order to compensate the local temperature decrease caused by the carriers.