Based on our vast experience in monitoring temperatures in high technology applications, we can offer a variety of sensors ranging from temperature profiling of diffusion ovens, to sensors that control the temperature in clean rooms.
We offer ultra-high temperature thermocouples to measure temperatures over 2000°c and we can provide a wide range of sheath materials, elements and insulating materials. Our special plate heaters for semi-conductors provide superior performance and uniform surface temperature under vacuum conditions in CVD, sputtering and ion plating devices used in semi-conductor equipment. Our advanced heater and measurement technologies enable us to provide a heater with a surface temperature up to 850°c and uniformity within 1%.
We prefer to speak to our clients to tailor a solution that best suits their needs. Please get in touch to discuss your requirements.
With Aeroheat® shaped into a plate it can be used as a plate heater, essential in semi-conductor production. These plates heat up quickly and provide superior surface temperature uniformity.